Cryopump is used in semiconductor/IC, flat panel display, and vacuum coating system. It provides ultra-high vacuum environment in vacuum chamber.
200mm Cryopump Specification
Pumping Speed (L/S）
Nitrogen
1700
Hydrogen
2700
Argon
1400
Water Vapor
4000
Capacity (L)
Argon
1000
Hydrogen
17
Max. Vacuum (Pa)
10-7
Flange Type
ISO、ANSI、CF
Weight (Kg)
20
Regeneration Controller
Automatic
Cooling Time (Min)
100
WeChat scan code
Telephone0512-57270799
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