Cryopump is used in semiconductor/IC, flat panel display, and vacuum coating system. It provides ultra-high vacuum environment in vacuum chamber.
400mm Cryopump Specification
Pumping Speed (L/S）
Nitrogen
6000
Hydrogen
10000
Argon
5000
Water Vapor
16000
Capacity (L)
Argon
4300
Hydrogen
24
Max. Vacuum (Pa)
10-7
Flange Type
ISO, ANSI, UVG
Weight (Kg)
70
Regeneration Controller
Automatic
Cooling Time (Min)
120
WeChat scan code
Telephone0512-57270799
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