Cryopump is used in semiconductor/IC, flat panel display, and vacuum coating system. It provides ultra-high vacuum environment in vacuum chamber.
550mm Cryopump Specification
|
Pumping Speed (L/S） |
Nitrogen |
15000 |
|
Hydrogen |
25000 |
|
|
Argon |
14000 |
|
|
Water Vapor |
39000 |
|
|
Capacity (L) |
Argon |
8100 |
|
Hydrogen |
85 |
|
|
Max. Vacuum (Pa) |
10-7 |
|
|
Flange Type |
GB、ISO、ANSI、UVG
|
|
|
Weight (Kg) |
120 |
|
|
Regeneration Controller |
Automatic |
|
|
Cooling Time (Min) |
180 |
|
WeChat scan code
Telephone0512-57270799
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